Agilent Technologies 16440A Manuel de service télécharger pdf (Page 81)

Agilent B1500A Configuration and Connection Guide, Edition 5 3- 21

Connection Guide for Wafer Prober

WGFMU and RSU

3.5.2 Connecting RF Probes

The RF measurement system supports the measurement of the three-terminal MOSFET

(source and well (substrate) are shorted) by using the RF probes as shown in

Figure 3-22.

One measurement path is for the gate terminal and the other path is for the drain terminal.

Moreover, the source/well terminal must be electrically connected to the ground via the

shielding of the measurement path (RF probes and measurement cables). See

Figure 3-23.

Figure 3-22 RF probes

Prepare two RF probes to perform the RF measurement. The RF probe must have the

signal line and the ground lines as shown in

Figure 3-23. The signal line is to connect the

gate or drain pad, and the ground lines are to connect the source/well pads. For the RF

probe and its installation, consult your favorite prober vender.

Figure 3-22 shows RF

probes from Cascade Microtech, Inc.

Figure 3-23 Contact Pad and Probe Tip

to Drain

to Gate

Signal

Gnd

Signal

Gnd

Gate

Drain

RF probe

Source/Well

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Agilent Technologies 16440A Manuel de service Page 81