Agilent Technologies B1500A Guide de l'utilisateur

Agilent TechnologiesAgilent B1500ASemiconductor Device AnalyzerUser’s Guide

Power Supply and Measurement Safety•Power Supply SafetyThis instrument can output high currents and voltages. Make sure that the load or device under

3- 22 Agilent B1500A User’s Guide, Edition 13InstallationInstalling AccessoriesTo install 16495K Fix your necessary 16495 connector plates to the shie

Agilent B1500A User’s Guide, Edition 13 3- 23InstallationInstalling AccessoriesTo connect SCUU/GSWU 1To attach the SCUU to the B1500A:1. Attach the SC

3- 24 Agilent B1500A User’s Guide, Edition 13InstallationInstalling Accessories2. Fix the SCUU inside or outside the shielding box. The SCUU must be f

Agilent B1500A User’s Guide, Edition 13 3- 25InstallationInstalling AccessoriesTo Connect GNDU AdapterThe ground unit (GNDU) output is the single tria

3- 26 Agilent B1500A User’s Guide, Edition 13InstallationInstalling AccessoriesTo Connect MCSMU Connection BoxAgilent N1255A connection box is used to

Agilent B1500A User’s Guide, Edition 13 3- 27InstallationInstalling AccessoriesFigure 3-9 N1255A Internal Connections• SW1: Kelvin/Non-Kelvin selectio

3- 28 Agilent B1500A User’s Guide, Edition 13InstallationInstalling AccessoriesNOTESeries Resistor and Shunt ResistorThe series resistor and the shunt

Agilent B1500A User’s Guide, Edition 13 3- 29InstallationMounting ConnectorsMounting Connectors Previous sections described how to install the availab

3- 30 Agilent B1500A User’s Guide, Edition 13InstallationMounting ConnectorsTable 3-5 Recommended Parts Table 3-6 Dimensions of Connector Holes Usage

Agilent B1500A User’s Guide, Edition 13 3- 31InstallationMounting ConnectorsTo Make an Interlock Circuit The interlock circuit is designed to prevent

• Source/Monitor TerminalsSource/monitor unit, SMU, can simultaneously perform DC voltage or current output and measurement. Typical SMU has the Force

3- 32 Agilent B1500A User’s Guide, Edition 13InstallationMounting ConnectorsInstalling the interlock circuitInstall the interlock circuit as follows:1

Agilent B1500A User’s Guide, Edition 13 3- 33InstallationMounting ConnectorsFigure 3-13 Dimensions of the Interlock Switch (Agilent part number 3101-0

3- 34 Agilent B1500A User’s Guide, Edition 13InstallationMounting ConnectorsTo Connect GNDU Output The GNDU output connection examples are shown in Ta

Agilent B1500A User’s Guide, Edition 13 3- 35InstallationMounting ConnectorsTo Connect SMU Output The SMU output connection examples are shown in Tabl

3- 36 Agilent B1500A User’s Guide, Edition 13InstallationMounting ConnectorsTable 3-8 SMU Output ConnectionsNOTETo Minimize Leakage CurrentFor the hig

Agilent B1500A User’s Guide, Edition 13 3- 37InstallationMounting ConnectorsFigure 3-16 ASU Output Kelvin Connection (Remote Sensing)The ASU inputs ca

3- 38 Agilent B1500A User’s Guide, Edition 13InstallationMounting ConnectorsFigure 3-17 ASU Output non-Kelvin ConnectionThe ASU inputs can be connecte

Agilent B1500A User’s Guide, Edition 13 3- 39InstallationMounting ConnectorsFigure 3-18 SCUU Output Kelvin Connection (Remote Sensing)The SCUU should

3- 40 Agilent B1500A User’s Guide, Edition 13InstallationMounting ConnectorsFigure 3-19 SCUU Output non-Kelvin ConnectionThe SCUU should be connected

Agilent B1500A User’s Guide, Edition 13 3- 41InstallationMounting ConnectorsTo Connect MCSMU OutputThe MCSMU output connection example is shown in Fig

High Voltage Shock HazardAgilent B1500A can force dangerous voltages (±200 V for HPSMU and ±100 V for MPSMU/HRSMU) at the Force, Guard, and Sense term

3- 42 Agilent B1500A User’s Guide, Edition 13InstallationMounting ConnectorsTo Connect MFCMU OutputThe MFCMU output connection example is shown in Fig

Agilent B1500A User’s Guide, Edition 13 3- 43InstallationConnecting Measurement DevicesConnecting Measurement DevicesThis section describes how to con

3- 44 Agilent B1500A User’s Guide, Edition 13InstallationConnecting Measurement DevicesUsing Test Fixture1. Press the Stop key to set the output off.2

Agilent B1500A User’s Guide, Edition 13 3- 45InstallationConnecting Measurement DevicesConnections for High Current MeasurementsWhen you force or meas

3- 46 Agilent B1500A User’s Guide, Edition 13InstallationConnecting Measurement DevicesUsing Connector PlateThis section provides the information usef

Agilent B1500A User’s Guide, Edition 13 3- 47InstallationConnecting Measurement DevicesCAUTION Never connect the guard terminal to any other output, i

3- 48 Agilent B1500A User’s Guide, Edition 13InstallationConnecting Measurement DevicesTo Measure Low ResistanceWhen you measure a low resistance, hig

Agilent B1500A User’s Guide, Edition 13 3- 49InstallationConnecting Measurement DevicesKelvin Connection (Remote Sensing)Kelvin connections give good

3- 50 Agilent B1500A User’s Guide, Edition 13InstallationCapacitance Compensation When Using Switching MatrixCapacitance Compensation When Using Switc

Agilent B1500A User’s Guide, Edition 13 3- 51InstallationCapacitance Compensation When Using Switching MatrixRequired ConditionsThe following conditio

Gefahr durch HochspannungVon den Geräten Agilent B1500A können Spannungen an den Anschlüssen “Force”, “Guard” und “Sense” von bis zu 200 V ausgehen. U

3- 52 Agilent B1500A User’s Guide, Edition 13InstallationCapacitance Compensation When Using Switching MatrixIn Figure 3-22, C1 (DATA04), C2H (DATA05)

Agilent B1500A User’s Guide, Edition 13 3- 53InstallationCapacitance Compensation When Using Switching MatrixTo Create Compensation Data FileThis sect

3- 54 Agilent B1500A User’s Guide, Edition 13InstallationCapacitance Compensation When Using Switching Matrix• For E5250A:The lines DATA05 to DATA08 s

Agilent B1500A User’s Guide, Edition 13 3- 55InstallationCapacitance Compensation When Using Switching Matrix2. Measure the R, L, C values of the for

3- 56 Agilent B1500A User’s Guide, Edition 13InstallationCapacitance Compensation When Using Switching MatrixTo obtain compensation coefficientsObtain

Agilent B1500A User’s Guide, Edition 13 3- 57InstallationCapacitance Compensation When Using Switching MatrixTable 3-11 Template Compensation Data Fil

3- 58 Agilent B1500A User’s Guide, Edition 13InstallationMaintenanceMaintenanceMaintenance should be performed periodically to keep the instrument in

Agilent B1500A User’s Guide, Edition 13 3- 59InstallationAbout Plug-in ModulesAbout Plug-in ModulesThis section describes the following notices about

3- 60 Agilent B1500A User’s Guide, Edition 13InstallationAbout Plug-in ModulesTo Interconnect SPGUsIf multiple SPGUs have been installed, connect the

Agilent B1500A User’s Guide, Edition 13 3- 61InstallationAbout Plug-in ModulesTo Interconnect WGFMUsIf multiple WGFMUs have been installed, connect th

Danger de choc dû à une haute tensionUne tension dangereuse (max. ± pour HPSMU; 200 Vdc, max. ± pour MPSMU/ HRSMU; 100 Vdc) émanant du dispositif Agi

3- 62 Agilent B1500A User’s Guide, Edition 13InstallationAbout Plug-in ModulesAbout Module InstallationModule installation must be carried out at an A

4 Specifications

4- 2 Agilent B1500A User’s Guide, Edition 13SpecificationsThis chapter describes the specifications and supplemental characteristics for Agilent B1500

Agilent B1500A User’s Guide, Edition 13 4- 3SpecificationsHardwareHardwareSpecification ConditionsThe measurement and output accuracy are specified at

4- 4 Agilent B1500A User’s Guide, Edition 13SpecificationsHardwareSupported Plug-in ModulesThe B1500A supports ten slots for the following plug-in mod

Agilent B1500A User’s Guide, Edition 13 4- 5SpecificationsHardware• Spot, sweep, and more measurement capabilities• Sampling (time domain) measurement

4- 6 Agilent B1500A User’s Guide, Edition 13SpecificationsHardware• Ultra-fast IV measurement capability for the pulsed IV and transient IV such as NB

Agilent B1500A User’s Guide, Edition 13 4- 7SpecificationsHardwareGround Unit (GNDU)The GNDU is furnished standard with the mainframe.• Output voltage

4- 8 Agilent B1500A User’s Guide, Edition 13SpecificationsHardwareMPSMU/HRSMUMPSMU: Medium Power Source/Monitor UnitHRSMU: High Resolution Source/Moni

Agilent B1500A User’s Guide, Edition 13 4- 9SpecificationsHardwareTable 4-1 Voltage range, resolution, and accuracy (high resolution ADC)Table 4-2 Cur

高電圧感電注意Agilent B1500A の Force、Guard、Sense 端子には、危険電圧が出力されることがあります（HPSMU の場合は最大 ±200 Vdc、MPSMU/HRSMU の場合は最大 ±100 Vdc）。感電事故防止のため、必ず以下の事柄を守ってください。•3 極電源ケー

4- 10 Agilent B1500A User’s Guide, Edition 13SpecificationsHardwareTable 4-3 Voltage range, resolution, and accuracy (high speed ADC)Table 4-4 Current

Agilent B1500A User’s Guide, Edition 13 4- 11SpecificationsHardwareASUASU: Atto Sense and Switch Unit• Maximum voltage, AUX path100 V (AUX input to AU

4- 12 Agilent B1500A User’s Guide, Edition 13SpecificationsHardwareHPSMUHPSMU: High Power Source/Monitor Unit• Voltage range, resolution, and accuracy

Agilent B1500A User’s Guide, Edition 13 4- 13SpecificationsHardwareTable 4-5 Voltage range, resolution, and accuracy (high resolution ADC)Table 4-6 Cu

4- 14 Agilent B1500A User’s Guide, Edition 13SpecificationsHardwareTable 4-7 Voltage range, resolution, and accuracy (high speed ADC)Table 4-8 Current

Agilent B1500A User’s Guide, Edition 13 4- 15SpecificationsHardwareMCSMUMedium Current Source/Monitor Unit• Voltage range, resolution, and accuracySee

4- 16 Agilent B1500A User’s Guide, Edition 13SpecificationsHardwareTable 4-9 MCSMU voltage range, resolution, and accuracyTable 4-10 MCSMU current ran

Agilent B1500A User’s Guide, Edition 13 4- 17SpecificationsHardwareSMU Common Specifications• Output terminal/connectionDual triaxial connector, Kelvi

4- 18 Agilent B1500A User’s Guide, Edition 13SpecificationsHardwareFor MCSMU• Width: 10 s to 100 ms (1 A range), 10 s to 2 s (10 A to 100 mA ranges

Agilent B1500A User’s Guide, Edition 13 4- 19SpecificationsHardwareSMU Supplemental Characteristics• Current compliance setting accuracy (for opposite

Product Stewardship• Waste Electrical and Electronic Equipment (WEEE) Directive 2002/96/ECThis product complies with the WEEE Directive (2002/96/EC) m

4- 20 Agilent B1500A User’s Guide, Edition 13SpecificationsHardware• Maximum allowable cable resistance (Kelvin connection)For HPSMU, MPSMU, HRSMU: 10

Agilent B1500A User’s Guide, Edition 13 4- 21SpecificationsHardware• Overshoot (filter ON)For HPSMU, MPSMU, HRSMUVoltage source: 0.03 % of V rangeCurr

4- 22 Agilent B1500A User’s Guide, Edition 13SpecificationsHardwareMFCMUMFCMU: Multi Frequency Capacitance Measurement Unit• Measurement functions• Me

Agilent B1500A User’s Guide, Edition 13 4- 23SpecificationsHardware• DC bias function•DC biasRange: 0 to ± 25 VResolution: 1 mVAccuracy: ± (0.5 % + 5.

4- 24 Agilent B1500A User’s Guide, Edition 13SpecificationsHardware• Measurement accuracyMeasurement accuracy at the measurement port of the MFCMU or

Agilent B1500A User’s Guide, Edition 13 4- 25SpecificationsHardwareTable 4-11 Parameters EPOSC, ZOSCVosc is oscillator level in mV.Table 4-12 Paramete

4- 26 Agilent B1500A User’s Guide, Edition 13SpecificationsHardwareTable 4-14 Example of calculated C/G measurement accuracyFrequencyMeasured Capacita

Agilent B1500A User’s Guide, Edition 13 4- 27SpecificationsHardwareSCUU/GSWUSCUU: SMU CMU Unify UnitGSWU: Guard Switch UnitThe SCUU multiplexes the ou

4- 28 Agilent B1500A User’s Guide, Edition 13SpecificationsHardware• SCUU supplemental characteristics•SMU pathOffset current: < 20 fAOffset voltag

Agilent B1500A User’s Guide, Edition 13 4- 29SpecificationsHardwareAdditional errors (for SMU voltage output accuracy): ± 100 V (open load)• DC bias

Precautionary StatementAgilent B1500A Semiconductor Device Analyzer operates in the Microsoft Windows environment. Agilent B1500A requires Agilent Eas

4- 30 Agilent B1500A User’s Guide, Edition 13SpecificationsHardwareHV-SPGUHV-SPGU: High Voltage Semiconductor Pulse Generator Unit• Number of output c

Agilent B1500A User’s Guide, Edition 13 4- 31SpecificationsHardwareTable 4-15 Pulse range and pulse parameterItemValue aa. Unless otherwise stated, al

4- 32 Agilent B1500A User’s Guide, Edition 13SpecificationsHardwareTable 4-16 Pulse/DC output voltage and accuracy• ALWG (arbitrary linear waveform ge

Agilent B1500A User’s Guide, Edition 13 4- 33SpecificationsHardware• Programmable timing range: 10 ns to 671.088630 ms, 10 ns resolution• SPGU supplem

4- 34 Agilent B1500A User’s Guide, Edition 13SpecificationsHardwareSelectorAgilent 16440A (B1500A-A04) SMU/pulse generator selector switches either a

Agilent B1500A User’s Guide, Edition 13 4- 35SpecificationsHardwareWGFMU/RSUWGFMU: Waveform Generator/Fast Measurement UnitRSU: Remote-sense and Switc

4- 36 Agilent B1500A User’s Guide, Edition 13SpecificationsHardwareThe V Monitor terminal outputs a buffered signal equal to 1/10 of the Output termin

Agilent B1500A User’s Guide, Edition 13 4- 37SpecificationsHardware• WGFMU supplemental data•RSU SMU pathLeakage current: < 100 pAResidual resistan

4- 38 Agilent B1500A User’s Guide, Edition 13SpecificationsHardwareTable 4-18 Voltage force accuracy, resolution, and timingV force (Fast IV mode) -5

Agilent B1500A User’s Guide, Edition 13 4- 39SpecificationsHardwareTable 4-19 Voltage measurement accuracy, resolution, and noiseTable 4-20 Current me

Working in ComfortTo optimize your comfort and productivity, it is important that you set up your work area correctly and use your instrument properly

4- 40 Agilent B1500A User’s Guide, Edition 13SpecificationsHardwareTable 4-22 Minimum timing parameters for current measurement1Voltage applied to DUT

Agilent B1500A User’s Guide, Edition 13 4- 41SpecificationsHardwareTable 4-23 Minimum timing parameters for voltage measurement1Voltage applied to DUT

4- 42 Agilent B1500A User’s Guide, Edition 13SpecificationsEasyEXPERT SoftwareEasyEXPERT SoftwareOperation mode• Application test modeRealizes applica

Agilent B1500A User’s Guide, Edition 13 4- 43SpecificationsEasyEXPERT SoftwareOscilloscope viewAvailable for the tracer test using MCSMU modules. The

4- 44 Agilent B1500A User’s Guide, Edition 13SpecificationsEasyEXPERT SoftwareMeasurement modesSupports the following measurement modes.• IV measureme

Agilent B1500A User’s Guide, Edition 13 4- 45SpecificationsEasyEXPERT SoftwareStep delay time: 0 to 1 s, 100 s resolutionStep output trigger delay ti

4- 46 Agilent B1500A User’s Guide, Edition 13SpecificationsEasyEXPERT Software• Current offset cancelThis function subtracts the offset current from t

Agilent B1500A User’s Guide, Edition 13 4- 47SpecificationsEasyEXPERT SoftwareAutomatic analysis functionOn a graphics plot, the markers and lines can

4- 48 Agilent B1500A User’s Guide, Edition 13SpecificationsEasyEXPERT SoftwareWorkspace and data management• WorkspaceSeparate work environment for Ea

Agilent B1500A User’s Guide, Edition 13 4- 49SpecificationsProgram and interface capabilitiesProgram and interface capabilities• Data storageHard disk

• Performing an activity in an awkward or unnatural posture.• Maintaining static posture for prolonged periods.• Failing to take frequent short breaks

4- 50 Agilent B1500A User’s Guide, Edition 13SpecificationsDesktop EasyEXPERT SoftwareNOTE For the latest system requirements, go to www.agilent.com a

Agilent B1500A User’s Guide, Edition 13 4- 51SpecificationsGeneral SpecificationsGeneral Specifications• Temperature rangeOperating: +5 C to +40 CSt

4- 52 Agilent B1500A User’s Guide, Edition 13SpecificationsGeneral Specifications16440A Selector: 250 mm (W)  50 mm (H)  275 mm (D)16445A Selector a

5 Accessories and Options

5- 2 Agilent B1500A User’s Guide, Edition 13Accessories and OptionsFurnished accessories, available accessories, and available options of Agilent B150

Agilent B1500A User’s Guide, Edition 13 5- 3Accessories and OptionsTable 5-2 OptionsOption Item Description B1500A-015 1.5 m length of bundled cables

5- 4 Agilent B1500A User’s Guide, Edition 13Accessories and OptionsTable 5-3 B1500A-A04 Basic Flash Memory Cell PackageTable 5-4 B1500A-A311 WGFMU Add

Agilent B1500A User’s Guide, Edition 13 5- 5Accessories and OptionsTable 5-5 B1500A-A3P WGFMU Probe Cable KitTable 5-6 B1500A-A5F1 Test Fixture for Pa

5- 6 Agilent B1500A User’s Guide, Edition 13Accessories and OptionsTable 5-7 Available AccessoriesModel Number Option Item Description 16440A SMU/PGU

Agilent B1500A User’s Guide, Edition 13 5- 7Accessories and Options16445A Selector adapter for 16440A16445A-001 Control cable (B1500 to 16445A), 1.5 m

Notices© Agilent Technologies, Inc. 2005 - 2013No part of this manual may be reproduced in any form or by any means (including electronic storage and

In This Manual This manual describes the product overview and installation information of Agilent Technologies B1500A. This manual consists of the fol

5- 8 Agilent B1500A User’s Guide, Edition 13Accessories and Options16493Q SPGU-SPGU connection cable (SMA to SMA)16493Q-001 8 cm length16493R WGFMU Ca

Agilent B1500A User’s Guide, Edition 13 5- 9Accessories and Options16495F Connector plate w/ 12triax., Interlock, GNDU16495F-001 Bulkhead feedthrough

5- 10 Agilent B1500A User’s Guide, Edition 13Accessories and OptionsE5288A Atto Sense and Switch Unit (ASU)E5288A-001 Add triaxial and D-sub cables, 1

ContentsAgilent B1500A User’s Guide, Edition 131. Getting StartedTo Turn On/Off B1500A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

Agilent B1500A User’s Guide, Edition 13ContentsHPSMU - High Power SMU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

ContentsAgilent B1500A User’s Guide, Edition 13 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

Agilent B1500A User’s Guide, Edition 13ContentsDesktop EasyEXPERT Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

1 Getting Started

1- 2 Agilent B1500A User’s Guide, Edition 13Getting StartedThis chapter describes the basic operations of Agilent B1500A. Before learning the product

Agilent B1500A User’s Guide, Edition 13 1- 3Getting StartedTo Turn On/Off B1500ATo Turn On/Off B1500ANOTEWhen turning the B1500A onOpen the measuremen

1- 4 Agilent B1500A User’s Guide, Edition 13Getting StartedTo Turn On/Off B1500ATo Turn B1500A On1. Connect the power cable from Agilent B1500A to an

Agilent B1500A User’s Guide, Edition 13 1- 5Getting StartedTo Turn On/Off B1500ANOTE Agilent B1500A has the following front panel user interface.•Stop

DECLARATION OF CONFORMITY According to EN ISO/IEC 17050-1:2004Manufacturer’s Name: Agilent Technologies Singapore (International) Pte. Ltd. Manufactur

1- 6 Agilent B1500A User’s Guide, Edition 13Getting StartedTo Launch EasyEXPERTTo Launch EasyEXPERT1. If the automatic start function is off, the Star

Agilent B1500A User’s Guide, Edition 13 1- 7Getting StartedTo Launch EasyEXPERTIf Only One Workspace ExistsFor the screen as shown in Figure 1-1, perf

1- 8 Agilent B1500A User’s Guide, Edition 13Getting StartedTo Launch EasyEXPERTTo Create WorkspaceFor the screen as shown in Figure 1-2, perform the f

Agilent B1500A User’s Guide, Edition 13 1- 9Getting StartedTo Launch EasyEXPERTTo Select WorkspaceFor the screen as shown in Figure 1-3, perform the f

1- 10 Agilent B1500A User’s Guide, Edition 13Getting StartedTo Use Trace r Tes t ModeTo Use Tracer Test ModeThe following procedure performs the trace

Agilent B1500A User’s Guide, Edition 13 1- 11Getting StartedTo Use Tracer Test ModeTable 1-3 I/V Trace Measurement SetupFigure 1-4 Display Example of

1- 12 Agilent B1500A User’s Guide, Edition 13Getting StartedTo Use A ppl ica t io n Test Mo deTo Use Application Test ModeFor the screen as shown in F

Agilent B1500A User’s Guide, Edition 13 1- 13Getting StartedTo Use Applic ation Tes t ModeTo enter the value, use the USB keyboard or the screen/numer

1- 14 Agilent B1500A User’s Guide, Edition 13Getting StartedTo Use C las sic Test Mod eTo Use Classic Test ModeThe following procedure performs the I/

Agilent B1500A User’s Guide, Edition 13 1- 15Getting StartedTo U se C las sic Test Mod eSee “To Perform Measurement” on page 1-16 to start measuremen

DECLARATION OF CONFORMITY According to EN ISO/IEC 17050-1:2004Manufacturer’s Name: Agilent Technologies Singapore (International) Pte. Ltd. Manufactur

1- 16 Agilent B1500A User’s Guide, Edition 13Getting StartedTo Pe r form Me asu rem entTo Perform Measurement1. Click the Single button (upper right o

Agilent B1500A User’s Guide, Edition 13 1- 17Getting StartedTo Pe rfo rm Mea s ure mentTo Use Test Result EditorThe Test Result Editor provides the fo

1- 18 Agilent B1500A User’s Guide, Edition 13Getting StartedTo Use A n al ysis Tool sTo Use Analysis ToolsThe Data Display window provides several ana

2 Introduction

2- 2 Agilent B1500A User’s Guide, Edition 13IntroductionThis chapter describes the basic functions and features of Agilent B1500A Semiconductor Device

Agilent B1500A User’s Guide, Edition 13 2- 3IntroductionOverviewOverviewAgilent B1500A Semiconductor Device Analyzer is the new generation one box sol

2- 4 Agilent B1500A User’s Guide, Edition 13IntroductionOverview• Agilent B1500A Semiconductor Device AnalyzerMainframe that provides the ground unit

Agilent B1500A User’s Guide, Edition 13 2- 5IntroductionOverview• WGFMU module and RSUWaveform generator/fast measurement unit module and the remote-s

2- 6 Agilent B1500A User’s Guide, Edition 13IntroductionOverviewAgilent EasyEXPERT SoftwareAgilent EasyEXPERT software is a specially-designed Windows

Agilent B1500A User’s Guide, Edition 13 2- 7IntroductionOverviewClassic Test You can perform measurements by using the user interface similar to the s

COMPLIANCE WITH GERMAN NOISE REQUIREMENTSThis is to declare that this product is in conformance with the German Regulation on Noise Declaration for Ma

2- 8 Agilent B1500A User’s Guide, Edition 13IntroductionFront ViewFront ViewThis section describes the front view of Agilent B1500A.1. Standby switchT

Agilent B1500A User’s Guide, Edition 13 2- 9IntroductionFront View2. HDD access indicatorThis green LED lights in the access status of HDD or DVD driv

2- 10 Agilent B1500A User’s Guide, Edition 13IntroductionFront View10. SoftkeysSeven softkeys are available for Agilent EasyEXPERT environment. Used t

Agilent B1500A User’s Guide, Edition 13 2- 11IntroductionRear ViewRear ViewThis section describes the rear view of Agilent B1500A.1. Serial numberYou

2- 12 Agilent B1500A User’s Guide, Edition 13IntroductionRear View3. LINE input receptacleAC power cable is connected to this receptacle.4. GPIB inter

Agilent B1500A User’s Guide, Edition 13 2- 13IntroductionRear View10. USB interfacesUSB, 2 ports. For keyboard, mouse, or peripherals.To remove USB de

2- 14 Agilent B1500A User’s Guide, Edition 13IntroductionRear ViewA. GNDU/ADCGround unit and A/D converter module. Always installed in the B1500A.B. S

Agilent B1500A User’s Guide, Edition 13 2- 15IntroductionRear ViewC. WGFMU moduleThe waveform generator/fast measurement unit (WGFMU) has the Ch 1 and

2- 16 Agilent B1500A User’s Guide, Edition 13IntroductionRear Viewunder test (DUT). Also the Lcur and Lpot have to be connected together at the other

Agilent B1500A User’s Guide, Edition 13 2- 17IntroductionMeasurement ModulesMeasurement ModulesAgilent B1500A can be equipped with the following measu

Safety SummaryThe following general safety precautions must be observed during all phases of operation, service, and repair of this instrument. Failur

2- 18 Agilent B1500A User’s Guide, Edition 13IntroductionMeasurement ModulesAbout SMUSource/monitor unit (SMU) can apply DC voltage or current, and ca

Agilent B1500A User’s Guide, Edition 13 2- 19IntroductionMeasurement ModulesHPSMU - High Power SMUThis section describes typical specification of the

2- 20 Agilent B1500A User’s Guide, Edition 13IntroductionMeasurement ModulesTable 2-1 HPSMU Output Voltage Ranges and Resolutions Table 2-2 HPSMU Outp

Agilent B1500A User’s Guide, Edition 13 2- 21IntroductionMeasurement ModulesTable 2-3 HPSMU Measurement Voltage Values and Resolutions Table 2-4 HPSMU

2- 22 Agilent B1500A User’s Guide, Edition 13IntroductionMeasurement ModulesMPSMU - Medium Power SMUThis section describes typical specification of th

Agilent B1500A User’s Guide, Edition 13 2- 23IntroductionMeasurement ModulesTable 2-5 MPSMU Output Voltage Ranges and Resolutions Table 2-6 MPSMU Outp

2- 24 Agilent B1500A User’s Guide, Edition 13IntroductionMeasurement ModulesTable 2-7 MPSMU Measurement Voltage Values and Resolutions Table 2-8 MPSMU

Agilent B1500A User’s Guide, Edition 13 2- 25IntroductionMeasurement ModulesNOTETo connect ASUTo use the ASU, it must be connected to the SMU which is

2- 26 Agilent B1500A User’s Guide, Edition 13IntroductionMeasurement ModulesMCSMU - Medium Current SMUThis section describes typical specification of

Agilent B1500A User’s Guide, Edition 13 2- 27IntroductionMeasurement ModulesTable 2-9 MCSMU Voltage Ranges and ResolutionsTable 2-10 MCSMU Current Ran

• GROUND THE INSTRUMENTThis is Safety Class I instrument. To minimize shock hazard, the instrument chassis and cabinet must be connected to an electri

2- 28 Agilent B1500A User’s Guide, Edition 13IntroductionMeasurement ModulesHRSMU - High Resolution SMUThis section describes typical specification of

Agilent B1500A User’s Guide, Edition 13 2- 29IntroductionMeasurement ModulesTable 2-11 HRSMU Output Voltage Ranges and Resolutions Table 2-12 HRSMU Ou

2- 30 Agilent B1500A User’s Guide, Edition 13IntroductionMeasurement ModulesTable 2-13 HRSMU Measurement Voltage Values and Resolutions Table 2-14 HRS

Agilent B1500A User’s Guide, Edition 13 2- 31IntroductionMeasurement ModulesNOTETo connect ASUTo use the ASU, it must be connected to the SMU which is

2- 32 Agilent B1500A User’s Guide, Edition 13IntroductionMeasurement ModulesMFCMU - Multi Frequency CMUThis section describes typical specification of

Agilent B1500A User’s Guide, Edition 13 2- 33IntroductionMeasurement ModulesTable 2-15 Measurement ParametersPrimary Parameter Secondary ParameterR (r

2- 34 Agilent B1500A User’s Guide, Edition 13IntroductionMeasurement ModulesTable 2-16 Measurement Range for Fixed Ranging ModeFigure 2-7 Impedance vs

Agilent B1500A User’s Guide, Edition 13 2- 35IntroductionMeasurement ModulesHVSPGU - High Voltage SPGUThis section describes key specification of the

2- 36 Agilent B1500A User’s Guide, Edition 13IntroductionMeasurement ModulesWGFMU - Waveform Generator/Fast Measurement UnitThis section describes typ

3 Installation

Safety SymbolsThe general definitions of safety symbols used on equipment or in manuals are listed below.Direct current.Alternating current.Earth grou

3- 2 Agilent B1500A User’s Guide, Edition 13InstallationThis chapter describes how to install Agilent B1500A and accessories.• “Requirements”• “Inspec

Agilent B1500A User’s Guide, Edition 13 3- 3InstallationWARNING There are potentially hazardous voltages (± 200 V for HPSMU, and ± 100 V for MPSMU/HRS

3- 4 Agilent B1500A User’s Guide, Edition 13InstallationRequirementsRequirements This section contains information on:• “Power Requirements”• “Operati

Agilent B1500A User’s Guide, Edition 13 3- 5InstallationRequirementsInstallation Requirements WARNING Do not operate the instrument in dusty environme

3- 6 Agilent B1500A User’s Guide, Edition 13InstallationRequirementsOption 900• Plug: BS 1363/A, 250 V, 10 A• PN: 8120-4420Option 901• Plug: AS/NZS 31

Agilent B1500A User’s Guide, Edition 13 3- 7InstallationInspection and InstallationInspection and InstallationThis section describes what to do when y

3- 8 Agilent B1500A User’s Guide, Edition 13InstallationInspection and InstallationTo Perform Initial SetupAfter you receive the instrument, perform t

Agilent B1500A User’s Guide, Edition 13 3- 9InstallationInspection and InstallationTable 3-1 Users Available Just After the Initial SetupYou can add u

3- 10 Agilent B1500A User’s Guide, Edition 13InstallationInspection and InstallationTo Change GPIB AddressWhen this instrument is shipped from the fac

Agilent B1500A User’s Guide, Edition 13 3- 11InstallationInspection and InstallationTo Enable System ControllerTo allow Agilent B1500A/EasyEXPERT to c

IEC Measurement Category IThe CE mark shows that the product complies with all applicable European Directives.The CSA mark is a registered trademark

3- 12 Agilent B1500A User’s Guide, Edition 13InstallationInstalling AccessoriesInstalling Accessories This section describes how to install the access

Agilent B1500A User’s Guide, Edition 13 3- 13InstallationInstalling AccessoriesTo Connect 16442B Test Fixture (B1500A-A5F)See this section if you use

3- 14 Agilent B1500A User’s Guide, Edition 13InstallationInstalling AccessoriesTable 3-2 To Connect 16442B (B1500A-A5F)Cables 16442B Terminals B1500A

Agilent B1500A User’s Guide, Edition 13 3- 15InstallationInstalling AccessoriesTo Connect Connector Plate The available connector plates are listed in

3- 16 Agilent B1500A User’s Guide, Edition 13InstallationInstalling AccessoriesTable 3-4 To Connect Connector PlateCables Connector PlateB1500A Termin

Agilent B1500A User’s Guide, Edition 13 3- 17InstallationInstalling AccessoriesTo Connect ASUAgilent E5288A Atto Sense and Switch Unit (ASU) adds the

3- 18 Agilent B1500A User’s Guide, Edition 13InstallationInstalling AccessoriesTo install ASU 1. Fix the ASU in the shielding box. The ASU must be fix

Agilent B1500A User’s Guide, Edition 13 3- 19InstallationInstalling AccessoriesTo connect MFCMU/4284A/ E4980A to AUXPerform the following procedure to

3- 20 Agilent B1500A User’s Guide, Edition 13InstallationInstalling AccessoriesFigure 3-2 To Connect ASUFigure 3-3 To Set Shorting BarTo connect other

Agilent B1500A User’s Guide, Edition 13 3- 21InstallationInstalling AccessoriesTo Connect SCUU/GSWUAgilent N1301A-100 SMU CMU Unify Unit (SCUU) is use