Agilent Technologies B1500A Guide de l'utilisateur Page 97
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Agilent B1500A User’s Guide, Edition 13 3- 19
Installation
Installing Accessories
To connect
MFCMU/4284A/
E4980A to AUX
Perform the following procedure to connect the MFCMU or the 4284A/E4980A.
See
Figure 3-2 and Figure 3-3.
Prepare a shorting bar furnished with the ASU. The shorting bar is effective for
reducing the offset capacitance caused by connecting a measurement terminal to the
chuck of a wafer prober.
1. Turn the instrument off.
2. Prepare two ASUs (#1 and #2) and two shorting bar. And perform the following
procedure for each ASU.
a. Disconnect the triaxial cable from the ASU if it is connected to the ASU
Force terminal.
b. Face the concave side of the shorting bar to front.
c. Slide the shorting bar from the right side of the connectors.
3. Connect the cable to the instrument. For the MFCMU, use the N1300A CMU
cable. For the 4284A/E4980A, use the 16048D/E test leads. It is ok to leave
open the ground wire extended from the cable.
4. Connect the high potential (Hp) cable of the test leads to the ASU #1 CMU-pot
terminal.
5. Connect the high current (Hc) cable to the ASU #1 CMU-cur/AUX In terminal.
The shorting bar is fixed to the ASU #1 by the step 5 and 6.
6. Connect the triaxial cable from the SMU #1 Force terminal to the ASU #1 Force
terminal.
7. Connect the low potential (Lp) cable to the ASU #2 CMU-pot terminal.
8. Connect the low current (Lc) cable to the ASU #2 CMU-cur/AUX In terminal.
The shorting bar is fixed to the ASU #2 by the step 8 and 9.
9. Connect the triaxial cable from the SMU #2 Force terminal to the ASU #2 Force
terminal.
10. Prepare the connection wire (both pin terminals) furnished with the ASU and
connect it between the CMU Return terminals of the ASU #1 and ASU #2
together.
NOTE
About ASU output cables
To perform capacitance measurements accurately, the cable length between DUT
and the ASU output must be as short as possible.
- Agilent B1500A 1
- Safety Summary 6
- Safety Symbols 8
- &$7 9
- v¨O½v¶´ 11
- Product Stewardship 16
- Precautionary Statement 17
- Working in Comfort 18
- In This Manual 20
- Contents 21
- 1 Getting Started 25
- + agb1500a 27
- + UsbDevice1 27
- To Turn B1500A On 28
- To Turn B1500A Off 28
- To Launch EasyEXPERT 30
- If Only One Workspace Exists 31
- To Create Workspace 32
- To Select Workspace 33
- To Use Tracer Test Mode 34
- To Use Application Test Mode 36
- Test Definitions 37
- To Use Classic Test Mode 38
- To Perform Measurement 40
- To Use Test Result Editor 41
- To Use Analysis Tools 42
- 2 Introduction 43
- Application Library 44
- Overview 45
- Agilent EasyEXPERT Software 48
- Front View 50
- Rear View 53
- GNDU - Ground Unit 59
- *1'8 59
- &RPPRQ 59
- About SMU 60
- HPSMU - High Power SMU 61
- MPSMU - Medium Power SMU 64
- To connect ASU 67
- Before using 1 pA range 67
- MCSMU - Medium Current SMU 68
- HRSMU - High Resolution SMU 70
- MFCMU - Multi Frequency CMU 74
- 300 k7 range 76
- 50 7 range 76
- HVSPGU - High Voltage SPGU 77
- 3 Installation 79
- Power Requirements 82
- Operating Environment 82
- Installation Requirements 83
- Power Cable 83
- Requirements 84
- Inspection and Installation 85
- To Perform Initial Setup 86
- To Change GPIB Address 88
- To Enable System Controller 89
- Installing Accessories 90
- To Set up 16442B (B1500A-A5F) 91
- To Connect Connector Plate 93
- To Connect ASU 95
- About ASU output cables 97
- To Connect SCUU/GSWU 99
- 6&88 100
- About SCUU output cables 101
- To Connect GNDU Adapter 103
- Selection switch SW2 and SW4 105
- Input Panel 106
- Output Panel 106
- Mounting Connectors 107
- 108
- ï ï0[ 108
- To Make an Interlock Circuit 109
- Connector side 109
- Interlock switch 109
- Wiring side 109
- Installation 111
- To Connect GNDU Output 112
- To Connect SMU Output 113
- To Minimize Leakage Current 114
- To Connect MCSMU Output 119
- To Connect MFCMU Output 120
- Stop key 121
- Using Test Fixture 122
- 6089 $0D[ 123
- 'UDLQ 123
- 6XEVWUDWH 123
- Using Connector Plate 124
- To Reduce Leakage Current 124
- '87 125
- To Measure Low Resistance 126
- Switching Matrix 128
- Required Conditions 129
- )25&(RU6(16($ 134
- )25&(RU6(16(% 134
- ,QVXODWRU 134
- 7ULD[LDO&DEOH 134
- Cleaning 136
- Self-test and Diagnostics 136
- Calibration 136
- Module Type and Locations 137
- To Interconnect SPGUs 138
- To Interconnect WGFMUs 139
- About Module Installation 140
- 4 Specifications 141
- Hardware 143
- Specification Conditions 143
- Supported Plug-in Modules 144
- Maximum Module Configuration 146
- Ground Unit (GNDU) 147
- MPSMU/HRSMU 148
- Specifications 149
- Connect ASU to dedicated SMU 151
- Connection path control 151
- SMU Common Specifications 157
- ± 1 mV (HPSMU) 161
- SCUU/GSWU 167
- : < 100 V at 300 sec 168
- Point Time Voltage 173
- Selector 174
- Selector Adapter 174
- WGFMU/RSU 175
- EasyEXPERT Software 182
- Operation mode 182
- Application library 182
- Oscilloscope view 183
- Measurement modes 184
- Sweep measurement 184
- Data display 186
- Automatic analysis function 187
- Arithmetic functions 187
- Workspace and data management 188
- External instrument control 188
- Furnished Software 189
- Desktop EasyEXPERT Software 190
- General Specifications 191
- 5 Accessories and Options 193
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