Agilent Technologies B1500A Guide de l'utilisateur télécharger pdf (Page 575)

100

101

Agilent B1500 User’s Guide, Edition 7 10-23

Application Library and Utilities

QSCV Measurement Supplemental Data

Table 10-5 Conditions for Calculating Measurement Accuracy

Calculation example data shown in Figure 10-6 through Figure 10-30 is applied to

the measurement data when the QSCV integration time is set to the same value as

the LEAK integration time.

Conditions

Measurement

unit:

HRSMU/ASU

Measurement

range

QSCV

operating mode

Output

range

Equivalent

parallel

resistance of

DUT

Guard

capacitance of

measurement

path

10 pA Normal 20 V 10 T ohm 200 pF Figure 10-6

100 pA Normal 20 V 10 T ohm 200 pF Figure 10-7

Normal 20 V 10 T ohm 1 nF Figure 10-8

Normal 20 V 100 G ohm 200 pF Figure 10-9

1 nA Normal 20 V 10 T ohm 200 pF Figure 10-10

Normal 20 V 10 T ohm 1 nF Figure 10-11

Normal 20 V 10 G ohm 200 pF Figure 10-12

Normal 20 V 1 G ohm 200 pF Figure 10-13

10 nA Normal 20 V 10 T ohm 200 pF Figure 10-14

Normal 20 V 10 G ohm 200 pF Figure 10-15

Normal 20 V 1 G ohm 200 pF Figure 10-16

100 nA Normal 20 V 10 T ohm 200 pF Figure 10-17

Normal 20 V 1 G ohm 200 pF Figure 10-18

Normal 20 V 100 M ohm 200 pF Figure 10-19

Normal 20 V 10 M ohm 200 pF Figure 10-20

1 μA Normal 20 V 10 T ohm 200 pF Figure 10-21

Normal 20 V 1 G ohm 200 pF Figure 10-22

Normal 20 V 100 M ohm 200 pF Figure 10-23

Normal 20 V 10 M ohm 200 pF Figure 10-24

10 pA 4155C/4156C

compatible

20 V 10 T ohm 200 pF Figure 10-25

100 pA 20 V 10 T ohm 200 pF Figure 10-26

1 nA 20 V 10 T ohm 200 pF Figure 10-27

10 nA 20 V 10 T ohm 200 pF Figure 10-28

100 nA 20 V 10 T ohm 200 pF Figure 10-29

1 μA 20 V 10 T ohm 200 pF Figure 10-30

1 2 ... 570 571 572 573 574 575 576 577 578 579 580 ... 627 628

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Agilent Technologies B1500A Guide de l'utilisateur Page 575

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