8-16 Agilent EasyEXPERT User’s Guide Vol. 2, Edition 1
Application Library
QSCV Maximum Measurement Value and Accuracy
Figure 8-1 Maximum Measurement Value Using 10 pA and 100 pA Range: HRSMU,
ASU+SMU
Figure 8-2 Maximum Measurement Value Using 1 nA Range: HPSMU, MPSMU,
HRSMU, ASU+SMU
1.00E-15
1.00E-14
1.00E-13
1.00E-12
1.00E-11
1.00E-10
1.00E-09
1.00E-08
1.00E-07
1.00E-06
0.001 0.01 0.1 1
QSCV Measurement Voltage (V)
Capacitance (F)
2s
1s
500ms
1.00E-12
1.00E-11
1.00E-10
1.00E-09
1.00E-08
1.00E-07
1.00E-06
1.00E-05
0.001 0.01 0.1 1
QSCV Measurement Voltage (V)
Capacitance (F)
300ms
100ms
50ms
30ms
Integration
Time
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