8-30 Agilent EasyEXPERT User’s Guide Vol. 2, Edition 1
Application Library
QSCV Maximum Measurement Value and Accuracy
Figure 8-10 Calculation Example of Measurement Accuracy: MP/HRSMU, ASU+SMU
Conditions:
QSCV Operating Mode: Normal
Measurement Range: 1 nA
Output Range: 20 V
Integration Time: 2, 1, 0.5, 0.3 s corresponding to the lines from top to bottom
Equivalent Parallel Resistance of DUT: 10 T
Guard Capacitance of Measurement Path: 200 pF
0
2
4
6
8
10
12
14
0.001 0.01 0.1 1 10
QSCV Measurement Voltage (V)
Reading Accuracy (%)
1.E-14
1.E-13
1.E-12
1.E-11
1.E-10
0.001 0.01 0.1 1 10
QSCV Measurement Voltage (V)
Offset Accuracy (F)
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